Characterization and optimization of infrared poly SiGe bolometers S Sedky, P Fiorini, K Baert, L Hermans, R Mertens IEEE transactions on Electron Devices 46 (4), 675-682, 1999 | 222 | 1999 |
Thermoelectric MEMS generators as a power supply for a body area network V Leonov, P Fiorini, S Sedky, T Torfs, C Van Hoof The 13th International Conference on Solid-State Sensors, Actuators and …, 2005 | 195 | 2005 |
Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers S Sedky, A Witvrouw, H Bender, K Baert IEEE transactions on Electron Devices 48 (2), 377-385, 2001 | 193 | 2001 |
Silicon germanium mask for deep silicon etching M Serry, A Rubin, M Refaat, S Sedky, M Abdo US Patent 8,791,021, 2014 | 183 | 2014 |
Nonlinear dynamics of spring softening and hardening in folded-MEMS comb drive resonators AM Elshurafa, K Khirallah, HH Tawfik, A Emira, AKSA Aziz, SM Sedky Journal of Microelectromechanical Systems 20 (4), 943-958, 2011 | 158 | 2011 |
Method of fabrication of an infrared radiation detector and infrared detector device P Fiorini, S Sedky, M Caymax, C Baert US Patent 6,194,722, 2001 | 129 | 2001 |
IR bolometers made of polycrystalline silicon germanium S Sedky, P Fiorini, M Caymax, A Verbist, C Baert Sensors and Actuators A: Physical 66 (1-3), 193-199, 1998 | 128 | 1998 |
Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications S Sedky, P Fiorini, M Caymax, S Loreti, K Baert, L Hermans, R Mertens Journal of microelectromechanical systems 7 (4), 365-372, 1998 | 80 | 1998 |
Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof K Baert, M Caymax, C Rusu, S Sedky, A Witvrouw US Patent 7,176,111, 2007 | 78 | 2007 |
Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics S Sedky, A Witvrouw, K Baert Sensors and Actuators A: Physical 97, 503-511, 2002 | 67 | 2002 |
Micromachined on-chip dielectric resonator antenna operating at 60 GHz MO Sallam, M Serry, S Sedky, A Shamim, W De Raedt, ... IEEE Transactions on Antennas and Propagation 63 (8), 3410-3416, 2015 | 54 | 2015 |
Characterization of bolometers based on polycrystalline silicon germanium alloys S Sedky, P Fiorini, M Caymax, C Baert, L Hermans, R Mertens IEEE Electron Device Letters 19 (10), 376-378, 1998 | 51 | 1998 |
Poly-SiGe, a superb material for MEMS A Witvrouw, M Gromova, A Mehta, S Sedky, P De Moor, K Baert, ... MRS Online Proceedings Library (OPL) 782, A2. 1, 2003 | 50 | 2003 |
Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in poly-SiGe MEMS structures S Sedky, RT Howe, TJ King Journal of Microelectromechanical Systems 13 (4), 669-675, 2004 | 49 | 2004 |
Generation of approximate focus-wave-mode pulses from wide-band dynamic Gaussian apertures AM Shaarawi, IM Besieris, RW Ziolkowski, SM Sedky JOSA A 12 (9), 1954-1964, 1995 | 49 | 1995 |
MEMS mass-spring-damper systems using an out-of-plane suspension scheme AKSA Aziz, AH Sharaf, MY Serry, SS Sedky US Patent 8,640,541, 2014 | 48 | 2014 |
New low-stress PECVD poly-SiGe layers for MEMS C Rusu, S Sedky, B Parmentier, A Verbist, O Richard, B Brijs, L Geenen, ... Journal of microelectromechanical systems 12 (6), 816-825, 2003 | 48 | 2003 |
Recent progress in modularly integrated MEMS technologies TJ King, RT Howe, S Sedky, G Liu, BCY Lin, M Wasilik, C Duenn Digest. International Electron Devices Meeting,, 199-202, 2002 | 43 | 2002 |
Why CMOS-integrated transducers? A review A Witvrouw, F Van Steenkiste, D Maes, L Haspeslagh, P Van Gerwen, ... Microsystem Technologies 6, 192-199, 2000 | 42 | 2000 |
Post-processing techniques for integrated MEMS S Sedky Artech, 2005 | 38 | 2005 |